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MEMS/MOEMS packaging : concepts, designs, materials, and processes /

Gilleo, Ken.

MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo. - New York : McGraw-Hill, c2005. - xiii, 220 p. : ill. ; 24 cm. - McGraw-Hill nanoscience and technology series .

Includes bibliographical references (p. 203-213) and index.

ISBN: 0071455566

LCCN: 2005049594

Subjects--Topical Terms:
Microelectronic packaging.
Microelectromechanical systems.
Optoelectronic devices.

LC Class. No.: TK7870.15 / .G55 2005

Dewey Class. No.: 621.381/046

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BGMEA University of Fashion and Technology University Library

MEMS/MOEMS packaging : concepts, designs, materials, and processes /

BGMEA University of Fashion and Technology
University Library