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| 008 | 050518s2005 nyua b 001 0 eng | ||
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_a621.381/046 _222 |
| 100 | 1 |
_aGilleo, Ken. _93782 |
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| 245 | 1 | 0 |
_aMEMS/MOEMS packaging : _bconcepts, designs, materials, and processes / _cKen Gilleo. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc2005. |
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| 300 |
_axiii, 220 p. : _bill. ; _c24 cm. |
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| 440 | 0 | _aMcGraw-Hill nanoscience and technology series | |
| 504 | _aIncludes bibliographical references (p. 203-213) and index. | ||
| 650 | 0 |
_aMicroelectronic packaging. _93783 |
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| 650 | 0 |
_aMicroelectromechanical systems. _93784 |
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_aOptoelectronic devices. _92223 |
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